Introduction to Micro and Nano Electromechanical Systems
Howe Roger T
Miniaturization technologies now have important roles in materials, mechanical, and biomedical engineering practice, in addition to being the foundation for information technology. This course will target an audience of first-year engineering graduate students and motivated senior-level undergraduates, with the goal of providing an introduction to M/NEMS fabrication techniques, selected device applications, and the design tradeoffs in developing systems. The course has no specific prerequisites, other than graduate or senior standing in engineering; otherwise, students will require permission of the instructors.